- All sections
- H - Electricity
- H01J - Electric discharge tubes or discharge lamps
- H01J 37/28 - Electron or ion microscopes; Electron- or ion-diffraction tubes with scanning beams
Patent holdings for IPC class H01J 37/28
Total number of patents in this class: 2769
10-year publication summary
|
224
|
191
|
188
|
181
|
269
|
257
|
270
|
278
|
258
|
67
|
| 2015 | 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Hitachi High-Tech Corporation | 4424 |
554 |
| ASML Netherlands B.V. | 6816 |
306 |
| Hitachi High-Technologies Corporation | 2034 |
253 |
| FEI Company | 851 |
202 |
| Carl Zeiss Microscopy GmbH | 1146 |
105 |
| Applied Materials Israel, Ltd. | 549 |
97 |
| JEOL Ltd. | 556 |
90 |
| KLA-Tencor Corporation | 2574 |
85 |
| KLA Corporation | 1223 |
58 |
| Carl Zeiss MultiSEM GmbH | 85 |
55 |
| Hitachi High-Tech Science Corporation | 326 |
45 |
| NuFlare Technology, Inc. | 770 |
41 |
| Carl Zeiss SMT GmbH | 2646 |
40 |
| ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | 149 |
40 |
| Hermes Microvision Incorporated B.V. | 129 |
38 |
| Hitachi, Ltd. | 16452 |
28 |
| Applied Materials, Inc. | 16587 |
26 |
| Fractilia, LLC | 23 |
19 |
| Samsung Electronics Co., Ltd. | 131630 |
18 |
| Technische Universiteit Delft | 646 |
18 |
| Other owners | 651 |